In-situ Wafer Temperature Monitoring
Non-Contact Temperature Sensors
CI Semi's family of noncontact temperature monitors (the NTM line), offers high end pyrometry products for the measurement of wafer temperatures during process. CI Semi’s flag ship of the line, the NTM Delta, incorporates real-time, same point emissivity measurement and compensation making it the ideal solution for in situ monitoring for processes such as RTP, CVD and PVD. The NTM family is sold to leading tool manufacturers.
Manufacturer Name:
CI Semi (1)
Location:
United States of America, United States
Description:
Monitoring and Control System Manufacturer
Link to Website:
http://www.ci-semi.com
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